Basic Info.
Product Description
This product is a 1200ºC plasma enhanced hybrid physical chemical vapor deposition (HPCVD) dual heating zone rotary tube furnace system. The equipment includes a dual heating zone tube furnace, a set of tungsten filament evaporation source, a set of plasma generator and a set of mass flowmeter system. Its working principle is to evaporate the reactant at the gas inlet end through the evaporation source and load it into the heating zone of the tube furnace through the airflow to carry out the CVD reaction. At the same time, the reaction is promoted by plasma enhancement. It is suitable for the heat treatment of inorganic composite powder and the surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on sample surface).
Technical parameters:
| Two heating zone tube furnace | Product model | CY-O1200-50IIT | |
| Furnace tube material | High purity quartz | ||
| Tube diameter | 50mm | ||
| Furnace tube length | 1200mm | ||
| Furnace chamber length | 440mm | ||
| Heating zone length | 200mm+200mm | ||
| Operating temperature | 0~1100ºC | ||
| Temperature control accuracy | ±1ºC | ||
| Temperature control mode | 30 or 50 segment program temperature control | ||
| Display mode | HD full color LCD touch screen | ||
| Sealing method | 304 stainless steel vacuum flange | ||
| Power supply | AC: 220V 50/60Hz 2.5kw | ||
| RF output system | Power range | 0~500W adjustable | |
| working frequency | 13.56MHz+0.005% | ||
| Working mode | Continuous output | ||
| Matched impedance mode | It can be matched, and the glow is evenly distributed throughout the furnace tube | ||
| Power stability | ≤2W | ||
| Normal working reflected power | ≤3W | ||
| Amplified reflected power | ≤70W | ||
| Harmonic component | ≤-50dBc | ||
| Overall efficiency | ≥70% | ||
| Power Factor | ≥90% | ||
| Supply voltage/frequency | Single-phase AC (187V~153V) frequency 50/60Hz | ||
| Control mode | Internal control/PLC analog quantity/RS232/485 communication | ||
| Power protection settings | DC over current protection, power amplifier over temperature protection, reflected power protection | ||
| Cooling method | Forced air cooling | ||
| Glow zone | Under Ar, the radio frequency power supply and the coil cooperate with the glow to fill the furnace tube | ||
| Evaporation boat | Working temperature | 1300ºC | |
| Evaporation source | Tungsten wire basket, optional tapered alumina crucible | ||
| Thermocouple | S type thermocouple | ||
| Working current | ≤30A | ||
| Max. power | 500W | ||
| Gas delivery system | Flowmeter | Four-channel mass flowmeter | |
| Flow range | MFC1 range: 0~200sccm MFC2 range: 0~200sccm MFC3 range: 0~500sccm MFC4 range: 0~500sccm Corresponding to gases H2, CH4, N2, Ar. | ||
| Measurement accuracy | ±1.5%F.S | ||
| Repeatability | ±0.2%FS | ||
| Linear accuracy | ±1%F.S. | ||
| Response time | ≤4s | ||
| Work pressure | -0.15Mpa~0.15Mpa | ||
| Flow control | LCD touch screen control, digital display, each channel gas contains needle valve for individually control. | ||
| Intake Interface | It can be connected with 1/4NPS or 6mm outer diameter stainless steel pipe | ||
| Outlet Interface | It can be connected with 1/4NPS or 6mm outer diameter stainless steel pipe | ||
| Connection method | Double ferrule connector | ||
| Operating temperature | 5~45ºC | ||
| Gas premix | Equipped with gas premixing device | ||
| Exhaust system | Product model | CY-GZK103-A | |
| Molecular pump | Turbomolecular pump | ||
| Backing pump | Two-stage rotary vane pump | ||
| Pumping rate | Molecular pump: 600L/S | Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa | |
| Rotary vane pump: 1.1L/S | |||
| Ultimate vacuum | 5×10E-4Pa | ||
| Pumping port | KF40 | ||
| Exhaust interface | KF16 | ||
| Vacuum measurement | Compound vacuum gauge | ||
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service