| Split Tube Furnace | - 208 - 240 VAC, 50/60Hz, 1.2 KW max. power consumption
- Working temperature: 1100°C continuous and 1200°C Max.
- 2" quartz tube (50mm O.D x 44mm I.D x 450mm L) with vacuum sealed flanges.
- Optioanl: you may choose dual zone tube furnace at Pic below right at extra cost to creat higher thermal gradient or longer constant temperature zone
-- two zone furnace |
Temperature Control
| - PID automatic control via solid state relay with 30 steps programmable
- Built in Over Temperature and Thermocouple Failure Protection
- +/-1°C accuracy
- K-type thermal couple
- Heating zone length: 200mm ( 8")
- Constant temperature zone: 60 mm (+/-1°C @ 1000 °C )
|
Vacuum Sealing
| - 2" quick clamp flange with 1/4'' fittings, vacuum gauge as well as needle valve on the right side
- The right flange is connected to a stainless steel bellow which is stretchable up to 150 mm.
- Left flange with quick-clamped KF25 vacuum port and 1/4'' barb venting valve
- Max. Vacuum level: 10E-2 torr by mechanical pump and 10-E5 by turbopump
|
Internal Traveling Mechanism &
PLC Control Pannel | - One 1/4" Dia. x 24'' long K-type thermal couple is inserted through the right flange to support a mini-crucible boat in the chamber. A step motor can drive the crucible inside the tube from the heating center to the right end of the furnace, 100 mm max.
- Touch screen control panel allows travel distance setting and temperature display of crucible position
- Traveling speed is constant at 180mm/ min. ( variable speed control is available upon request at additional cost )
- A 50x20x20mm mini-crucible boat (~20ml) is installed on a thermal couple (click pic.3 to view).
- AIN Sample Holder or Graphite Flat Substrate Holder for the wafer is available upon request, additional customization fee will apply
|
| Max. Heating & Cooling Rate | The max heating and cooling rate can be achieved by moving sample into pre-heated hot zone and move the sample out from hot zone. The typical ramp/cool rate is listed in below:
|
Optional Parts | - You may need a right angle valve & bellows to connect a vacuum pump ( click the 1st & 2nd pics to order )
- Anti-Corrosive digital Gauge up to 10E-5 torr is optional for CVD application (Pic 3)
- You may order multi-channel gas delivery system for DVD or CVD operation ( Pic 4)
|
| Dimensions | |
| Warranty | Two years limited warranty with lifetime support (Consumable parts such as tubes and o-rings are not covered by the warranty) |
| Laptop, software & WiFi Control(Optional) | - Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
- Labview Based Temperature Control System enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters operating range.
- Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
- Note: The software is only compatible with MTI's Yudian Temperature Controller
- ·
|
Compliance | - CE Certified
- All electric components ( >24V) are UL / MET / CSA certified
- The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.
|
Warning
| - Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
|
| Application Notes | This multi-functional furnace is suitable for the applications in below: - RTE: Crucible loaded with evaporation material is placed in the center of the furnace, move sample holder to a downstream position with appropriate temperature where the deposition takes place.
- HPCVD: Similar setup as RTE, we also introduce reactant gas to mix with evaporation vapor and make deposition
- Horizontal Bridgman Crystal Growth: Load material and seed into a crucible and place it in the center of the furnace. Move the crucible at the desired speed to grow single crystal under suitable thermal gradient.
- If you have any question and suggestion, please contact us before purchasing
- After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low
- For Horizontal directional crystalization (HDC), you may use a gas feedtrough as pic below:
-
|
